DOIONLINE 
DOIONLINE Publish In |
International Journal of Industrial Electronics and Electrical Engineering (IJIEEE)-IJIEEE |
 Journal Home Volume Issue |
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Issue |
Volume-7,Issue-11 ( Nov, 2019 ) | |||||||||
Paper Title |
The Development of ZnO: Li MEMS Lead-Free Piezoelectric Accelerometers | |||||||||
Author Name |
Cheng‐Ying Li, Ze-Hui Chen, Sheng‐Yuan Chu, Yen-Hsiang Huang, Po-Yu Hsiao, Yun‐Hui Liu, Chun-Cheng Lin | |||||||||
Affilition |
Department of Electrical Engineering, National Cheng Kung University Master Degree Program on Nano-Integrated-Circuit Engineering, National Cheng Kung University Center for Micro/Nano Science and Technology, National Cheng Kung University Department of Mechanical Engineering ,Southern, Taiwan University of Science and Technology Department of Mathematic and Physical Sciences, R.O.C. Air Force Academy | |||||||||
Pages |
1-4 | |||||||||
Abstract |
In this study, LZO (ZnO: 3 mol%Li) films were deposited on Si substrates by RF magnetron sputtering system. From the XRD and SEM observations, the LZO films showed c-axis preferred orientation. The piezoelectric constant d33value was measured as 13.8 pm/V, which is larger than those of the reported data. The accelerometers were then fabricated by MEMS process technology with the structure configuration of Si/SiO2/Pt/LZO/Pt and the sensitivity is 1.27 mv/g; the resonance frequency is 7800 Hz which can be used for unmanned vehicle applications. Keywords - ANSYS, Lead-Free, MEMS, Piezoelectricity, ZnO | |||||||||
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