DOIONLINE 
DOIONLINE Publish In |
International Journal of Mechanical and Production Engineering (IJMPE)-IJMPE |
 Journal Home Volume Issue |
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Issue |
Volume-3,Issue-4 ( Apr, 2015 ) | |||||||||
Paper Title |
A Novel Microfabrication Method For Su-8 Based Pressure Sensor | |||||||||
Author Name |
Payam Heydari, Mehrnaz Esfandiary, Ali Reza Shamsi | |||||||||
Affilition |
Islamic Azad University, Roudehen Branch, Engineering Faculty, Iran | |||||||||
Pages |
35-37 | |||||||||
Abstract |
This paper describes the novel development of SU-8 based MEMS capacitive pressure sensors. The device is inexpensive, simple to fabricate, lightweight, and accessible. This method is based on photolithography, but does not need an ultra-clean room and high precision mask production equipments. We demonstrated that the proposed pressure sensor can measure pressure with 22 pF/kPa sensitivity. The fabricated micropressure sensor has circular diaphragm with 2.5mm radius and 10µm thickness under silicon substrate. This low-cost device should be useful for applications in public health, environmental monitoring. Keywords- Pressure sensor, SU-8, Microelectromechanical System (MEMS). | |||||||||
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