DOIONLINE 
DOIONLINE Publish In |
International Journal of Mechanical and Production Engineering (IJMPE)-IJMPE |
 Journal Home Volume Issue |
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Issue |
Volume-5,Issue-12 ( Dec, 2017 ) | |||||||||
Paper Title |
Sic as a Promising Material for MEMS/NEMS: A Review | |||||||||
Author Name |
Musaab Zarog | |||||||||
Affilition |
IEEE Senior Member Department of Mechanical and Industrial Engineering, College of Engineering, Sultan Qaboos University, P.O. Box 33,Al-Khod,Muscat, 123, Oman | |||||||||
Pages |
84-86 | |||||||||
Abstract |
SIC has excellent mechanical and electrical properties that make it very promising material/candidate for MEMS/NEMS. This paper highlights some of the SiC properties that makes it more suitable, over conventional Si, for MEMS/NEMS applications. These applications include; high frequency resonators, RF MEMS, electrothermal actuators, and harsh environment applications. The aim of the paper is to review some of the very promising results which demonstrate that SiC as a potential material for each of the aforementioned applications. Keywords – Micro Electromechanical Systems, Electrostatic Actuation, Electro Thermal Actuators, RF MEMS, high frequency, Resonators. | |||||||||
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