Publish In |
International Journal of Advances in Science, Engineering and Technology(IJASEAT)-IJASEAT |
Journal Home Volume Issue |
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Issue |
Volume-8,Issue-3 ( Jul, 2020 ) | |||||||||
Paper Title |
Fabrication Optimization and Post-Processing Solutions for High-Resolution 3D Laser Lithography | |||||||||
Author Name |
Greta Merkininkaite, Darius Gailevicius, Rokas Vargalis,Simas Sakirzanovas, Linas Jonusauskas | |||||||||
Affilition |
Faculty of Chemistry and Geosciences, Vilnius University, Naugarduko 24, LT-03225 Vilnius, Lithuania Femtika Ltd., Saulėtekio Ave. 15, LT-10224 Vilnius, Lithuania Laser Research Center at Vilnius University, Saulėtekio Ave. 10, LT-10223 Vilnius, Lithuania | |||||||||
Pages |
21-23 | |||||||||
Abstract |
Multiphoton polymerization-based 3D laser lithography is a well-established technique for producing structures with arbitrary 3D architecture with feature sizes down to sub-μm. In this work we present methodologies and considerations needed to push feature size to 150 nm and bellow. These include peculiarities of using specialized hybrid organic-inorganic photopolymer SZ2080 with varying degrees of photosensitization, accounting for line broadening due to radical diffusion and post processing solutions such as pyrolysis/calcination. Opportunities and challenges related to these approaches are discussed with possibilities to use in wide-spread applications highlighted. Keywords - 3D Laser Lithography, Femtosecond Lasers, Hybrid Polymers, Nanostructures, Calcination | |||||||||
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